Equipment and Laboratories



Equipment and Laboratories

The HHI has 268 employees and more than 10,000 m2 of office, laboratory and clean room areas are available for processing the F & E orders.

  • Complete InP-process line (clean room class 10/1000, lithography
  • Dry etching systems, evaporation, sputtering and PECVD systems, doping diffusion)
  • CAD system for mask production Electron beam lithography
  • AR/HR coating
  • Chip assembly, fibre-chip coupling,
  • Scanning electron microscope, atomic force microscope