Equipment and Laboratories
Equipment and Laboratories
The HHI has 268 employees and more than 10,000 m2 of office, laboratory and clean room areas are available for processing the F & E orders.
- Complete InP-process line (clean room class 10/1000, lithography
- Dry etching systems, evaporation, sputtering and PECVD systems, doping diffusion)
- CAD system for mask production Electron beam lithography
- AR/HR coating
- Chip assembly, fibre-chip coupling,
- Scanning electron microscope, atomic force microscope
