SiN Integration Platform

At a Glance

Customized SiN PICs for wavelengths from NIR to VIS. The platform includes multiple photonic building blocks and supports hybrid integration of lasers, gain chips, and detectors. Applications in life sciences, analytics, and sensing are enabled by surface functionalization and wafer-level microfluidics.

Technical Background

Low-loss structures such as ring resonators, MMIs and AWGs, gratings as well as thermo-optical elements like phase shifters, VOAs and tunable gratings are fabricated on wafer scale.

Customized designs are available.

Features

  • Low-loss waveguides (< 0.2 dB/cm @ 1550 nm)
  • Passive and thermo-optical elements
  • Integration of active elements (InP, GaAs, PolyBoard etc.)
  • VIS to NIR wavelength range
  • SiN thickness of 200 or 400 nm
    (other thicknesses on request)
  • SSC enabling seamless integration with SMF and other PICs

Applications

Services

  • PDK-based PIC designs
  • Customized PIC designs
  • SiN wafer fabrication
  • Integration of active components
  • Packaging
External-cavity laser module at 1550 nm
Mode-locked laser module
µ-fluidic wafer (left) and SiN wafer (right)
Wafer-level microfluidics for sensing
Gratings in SiN
Hybrid integration of SiN with TFLN
Mode-locked laser (InP-SiN integration)