SiN Integration Platform

At a Glance

  • The SiN line of Fraunhofer HHI is specifically suitablefor actives-passives integration. Photonic building blocks include ring resonators, MMIs, AWGs, VOAs, tunable gratings and phase shifters.

Technical Background

Low loss structures such as ring resonators, MMIs and AWGs, gratings as well as thermo-optical elements like phase shifters VOAs and tunable gratings are fabricated on wafer scale.
Customized designs are available.

Features

  • Low-loss waveguides (< 0.2 dB/cm @ 1550 nm)
  • Passive and thermo-optical elements
  • Efficient hybrid integration of active elements (InP, GaAs, PolyBoard etc.)
  • VIS to NIR wavelength range
  • Different SiN thicknesses available:
    200 / 400 nm SiN
    (800 nm on request)
  • New SSC available enabling seamless hybrid integration with other PICs and SMF

Applications

  • Telecom / datacom
  • Sensing and analytics
  • Quantum technology
  • Medical and life sciences

Services

  • PIC design based on PDK for different wavelengths
  • Customized designs
  • Fabrication and hybrid integration of active and passive components
Wafer-level microfluidics for sensing
Gratings in SiN
Hybrid integration of SiN with TFLN
Mode locked laser (InP-SiN integration)
PIC from HHI’s SiN MPW run